Prevent process failures and poor device performance with the Chem 20™ chemical particle counter.
Respond quickly to chemical changes
Meet the International Roadmap for Devices and Systems (IRDS)
Reduce uncertainty with improved accuracy and reliability
Increase yield and reduce device defects or product recalls by preventing process contamination. The Chem 20™ offers online and batch sample-based chemical monitoring from incoming QC to point of use.
Learn why 20nm sensitivity is important in particle counting and how our system makes advances in water reduction and safety in our whitepaper.
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