20 nm Online & Batch Sample Chemical Particle Monitoring

Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the Chem 20 Chemical Particle Counter from Particle Measuring Systems (PMS) supports the International Roadmap for Devices and Systems (IRDS) and a large variety of chemicals. 

Extensive data on chemical distribution and packaging systems proves that the Chem 20 chemical particle counter, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance. Supporting both online and sample based monitoring, the Chem 20 particle counter provides flexible monitoring from incoming QC to point of use.

Product features

• • Overcoming Background Scatter
  • Laser Safety
  • Sensing Bubbles in Sample Flow
  • Handling a Reduction in Sample Flow
  • Leak Detection
  • Obtaining Stable and Repeatable Data

Learn more in the Educational Materials tab or contact us to learn more.

Particle Measuring Systems engineers, manufactures, installs, calibrates, repairs, and maintains the Chem 20™ particle counter.