20 nm Chemical Particle Counter: Chem 20™
Sensitivity range: 20 - 100 nm
20 nm Online & Sample Particle Monitoring
Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the Chem 20 Chemical Particle Counter from Particle Measuring Systems (PMS) supports the International Roadmap for Devices and Systems (IRDS) and a large variety of chemicals.
Extensive data on chemical distribution and packaging systems proves that the Chem 20 chemical particle counter, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.Supporting both online and sample based monitoring, the Chem 20 particle counter provides flexible monitoring from incoming QC to point of use.
- Overcoming Background Scatter
- Laser Safety
- Sensing Bubbles in Sample Flow
- Handling a Reduction in Sample Flow
- Leak Detection
- Obtaining Stable and Repeatable Data
Learn more in the Educational Materials tab or contact us to learn more.
We are changing the way you monitor critical fab environments.
Learn more about Industry Leading Sensitivity for monitoring for Air, Gas, Water, Chemicals and Airborne Molecular Contamination.
All from one place. Only from Particle Measuring Systems.
- 20 nm Chemical Batch Sampling Solution
- Particle Counting in Process ChemicalsEffervescent and Hot Chemicals
- Particle Contamination in Chemical Distribution SystemsAdvanced Data Analysis Strategies
- Monitoring Particles in Process Chemicals
- Uncovering Chemical Quality Improvements Through a Holistic Approach to Chemical Quality Management
- Component Cleanliness Testing for Liquid Systems
- Microbubbles as Contamination: Factors to Consider
- Particle Detection in Liquids with High Viscosity or Molecular Weight
- Refractive Index Effects on Particle Size Measurement
- Liquid Particle Counting Troubleshooting
- High-Purity Process Chemical Particle Contamination Control
- Beginner’s Guide to Particle Technology