Chemical Particle Counters

Chemical Particle Counter: HSLIS-M100e

Sensitivity range: 0.1 - 1.0 μm

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Product Details

  • 4 channel chemical particle counter
  • 0.1, 0.2, 0.5 and 1.0 μm particle monitoring size range
  • Operates with an optimal flow rate of 300 ml/min. +/-10%
  • Samples 1% of the flow volume or 3 ml/min
  • Compatible with corrosive liquids, including hydrogen fluoride (HF)
  • eSeries compatible with Facility Net Software
  • Existing network can be used with ethernet communication to Facility Net Software

Sensitivity range: 0.1 – 1.0 µm

  • Monitoring chemical delivery systems
  • Measuring filter efficiency
  • Episodic event tracking and alarming
  • Continuous chemical particle system monitoring
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