The SLS Syringe Sampling System uses a precision syringe and simple flow-path for delivering chemical samples from a sample vessel or chemical container, directly to the particle sensor. It is ideal for applications where precise, small-volume particle sampling is required, where the sampler device cannot contribute contamination to the chemical sample.

The system consists of a selectable syringe for either corrosive or non-corrosive liquids, a selectable particle counter for different sizing sensitivities, and batch-sampling software. The following SLS product systems are available:

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  • Proven PMS UltraChem or LiQuilaz particle sensors
  • Menu-driven data collection - 1, 5, 10 and 25 ml
  • Wetted materials compatible with corrosive chemicals
  • Compact design with on-board particle sensor


  • Precise particle measurement
  • Versatile - select various particle sensors and syringe sizes
  • Cost-effective
  • Easy-to-use
  • Small sample volume - eliminates sample waste


  • Diverse applications in semiconductor and process chemical manufacturing
  • Incoming quality measurement of process chemicals
  • Point-of-process monitoring on process tools
  • Testing and qualification of chemical components
  • Outgoing chemical qualification testing
  • Mechanical parts cleanliness testing

Available Accessories

SamplerSight Software

SamplerSight Software

SamplerSight Software is a user-friendly program for operating batch-based liquid particle measurement systems.

SLS Cleaning Kit

SLS Cleaning Kit

Syringe Liquid Sampler cleaning kit

Spare Syringe (1ml-25ml)

Spare Syringe (1ml-25ml)

Spare syringe for revision D and higher LS-200 and revision C and higher LS-50 samplers.

Magnetic Stirrer with Cable

Magnetic Stirrer with Cable

Magnetic stirrer with cable for mixing samples during syringe sampling.

Related Products

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UltraChem® 100 Liquid Particle Counter

The Ultrachem 100 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect particles as small as 100 nm in chemicals with high molecular scatter.

UltraChem® 40 Liquid Particle Counter

The UltraChem® 40 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect 40 nm particles in chemicals with high molecular scatter. 

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