As the critical particle size for semiconductor devices continues to shrink, the purity of the process chemicals used in their manufacture becomes increasingly important. Chemical suppliers will use a variety of techniques, including filtration, distillation, and ion exchange, to achieve the lowest possible particle contamination levels in their product.
The critical particle size for today’s leading-edge semiconductor technology is shrinking. Now in the sub-10 nm size-range, the control and mitigation of potentially yield-impacting particles is growing more important. Here, we’ll discuss how the Chem 20™ Chemical Particle Counter’s industry-leading sensitivity can be applied to a variety of applications, including…
In this blog series, we introduce the most sensitive system for detecting contamination in microelectronic applications. Through several rigorous studies, we demonstrate the veracity and reliability of data collection for various process chemicals.
In this blog series, we introduce the most sensitive system for detecting contamination in microelectronic applications. Through several rigorous studies, we demonstrate the veracity and reliability of data collection for various process chemicals.
