Particle Counting to 20 nm with the SLS-20 Chemical Batch Sampler

Particle Counting to 20 nm with the SLS-20 Chemical Batch Sampler

The SLS-20 Batch Sampler combined with the Chem 20 particle counter have been tested to sample contamination down to 20 nm in chemicals ranging from sulfuric acid to organic solvents. In this blog, we will be taking a look at the following process chemicals:

  • Hydrofluoric acid
  • Isopropyl alcohol
Syringe Liquid Particle Counter for Chem 20Hydrofluoric Acid

The SLS-20 / Chem 20 particle counting system from Particle Measuring Systems PMS was employed to test the cleanness of hydrofluoric acid. Blind tests were run on samples with different manufacturing processes which led to different cleanliness of the final product. As shown below, the particle concentrations of all four samples provided were measurable down to 20 nm. The particle count data was reliable and repeatable. On average, Sample 3 measured the least particle concentration, followed by Sample 1, with about 10% higher particle concentration. Sample 2 measured the highest particle concentration.

Isopropyl Alcohol

Isopropyl alcohol (IPA) can be tested with the SLS-20 and either the Chem 20 or Chem 20-HI, because its refractive index straddles between the two options. Below, you can see stable and repeatable data obtained by the system for IPA samples under both configuration options.

How Are We Viewing the Data?

The SLS-20 and Chem 20 system communicates seamlessly with SamplerSight software to bring you clear sampling data in a easy to understand format. Data is viewable in a variety of customizable graphic options.

Is 20-nm Sensitivity Right for You?

This combination of Particle Measuring Systems technology is the most sensitive batch sampling system in the world, and its unique feature of mode switching enables the measurement of chemicals with normal and high molecular scattering properties. The additional features offered with this system highlight the key strides made to improve safety and efficiency of particle measurements for process chemicals in the microelectronics industry. The SLS-20 and Chem 20 system, together with SamplerSight software, is the ultimate solution for 20 nm chemical batch sampling.

Get a quote for the SLS-20 and Chem 20 system. Have a question? Ask it here. And don’t forget to download the full paper for this blog series for a closer look at 20 nm batch sampling with the SLS-20.

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