Data from the Chem 20™ Chemical Particle Counter can inform manufacturers on the benefit of strategic filtration systems. In this blog, we look at cleaning systems for ultrapure water and potassium hydroxide.
Real-time data provided by the Chem 20 allows the user to evaluate the actual performance of their particle filters. For older filters, the Chem 20 can be used to determine whether the filter is still performing satisfactorily, or if it needs replacement.
The Chem 20 was placed inline with a dedicated filter-wetting machine used by a semiconductor manufacturer to study the effect of wetting and flushing new particle filters before they are used in production.
Chemical distribution modules control the supply of ultrapure process chemicals to the point of use. The chemical shouldn’t contain yield-threatening particle contamination here due to contact with wafers, masks, and other critical surfaces.
