In this blog series, we introduce the most sensitive system for detecting contamination in microelectronic applications. Through several rigorous studies, we demonstrate the veracity and reliability of data collection for various process chemicals.
In this blog series, we introduce the most sensitive system for detecting contamination in microelectronic applications. Through several rigorous studies, we demonstrate the veracity and reliability of data collection for various process chemicals.
When monitoring larger size particles, extinction optical particle counting is the typical method used for accurate results. The refractive index difference between microcontaminants and the liquid media being measured can be explored in an effort to determine the related extinction response. At submicron particle ranges, the index contract between a particle and the liquid media is important. The interplay of refractive index contrast and particle size analysis in liquids can be explored and described with the aid of Mie theory.