The SLS Syringe Sampling System uses a precision syringe and simple flow-path for delivering chemical samples from a sample vessel or chemical container, directly to the particle sensor. It is ideal for applications where precise, small-volume particle sampling is required, where the sampler device cannot contribute contamination to the chemical sample.

The system consists of a selectable syringe for either corrosive or non-corrosive liquids, a selectable particle counter for different sizing sensitivities, and batch-sampling software. The following SLS product systems are available:

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  • Proven PMS UltraChem or LiQuilaz particle sensors
  • Menu-driven data collection - 1, 5, 10 and 25 ml
  • Wetted materials compatible with corrosive chemicals
  • Compact design with on-board particle sensor


  • Precise particle measurement
  • Versatile - select various particle sensors and syringe sizes
  • Cost-effective
  • Easy-to-use
  • Small sample volume - eliminates sample waste


  • Diverse applications in semiconductor and process chemical manufacturing
  • Incoming quality measurement of process chemicals
  • Point-of-process monitoring on process tools
  • Testing and qualification of chemical components
  • Outgoing chemical qualification testing
  • Mechanical parts cleanliness testing

Available Accessories

SamplerSight Software

SamplerSight Software

SamplerSight Software is a user-friendly program for operating batch-based liquid particle measurement systems.

SLS Cleaning Kit

SLS Cleaning Kit

Syringe Liquid Sampler cleaning kit

Spare Syringe (1ml-25ml)

Spare Syringe (1ml-25ml)

Spare syringe for revision D and higher LS-200 and revision C and higher LS-50 samplers.

Magnetic Stirrer with Cable

Magnetic Stirrer with Cable

Magnetic stirrer with cable for mixing samples during syringe sampling.

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UltraChem® 40 Liquid Particle Counter

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