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News Blog
February 3, 2021 03:30 PM

Chemical Batch Sampling to 20 nm with the SLS-20

Written by PMS

Chemical Particle Counting Use Case Studies #1

The SLS-20 and Chem 20 system has been tested to sample contamination down to 20 nm in chemicals ranging from sulfuric acid to organic solvents. In this blog, we will be taking a look at the following process chemicals:

  • Sulfuric acid
  • PGME, PGMEA and PGEE

Sulfuric Acid

The SLS-20 and Chem 20-HI system is able to differentiate one lot from another based on 20 nm particulate levels in sulfuric acid. The SLS-20 and Chem 20-HI system was able to differentiate Lot 1 from Lot 2 for different processes during production. Overall, Lot 1 was 10% cleaner than Lot 2. For both lots, particle concentration at 20 nm was about one order higher than at 50 nm, indicating some room for quality improvement.

sulfuric acid particle counting using a batch sampler from Particle Measuring Systems PMS

PGME, PGMEA and PGEE

This section covers test results for: propylene glycol methyl ether (PGME), propylene glycol methyl ether acetate (PGMEA), and propylene glycol ethyl ether (PGEE) solvent-based chemicals. Under High Scatter Mode, the SLS-20 and Chem 20-HI system identified the cleanliness of PGME, PGMEA and PGEE samples down to 24 nm. The filtered PGME sample was nearly twice as clean as the non-filtered sample. The filtered PGMEA sample was nearly 20% cleaner than the non-filtered sample, and the filtered PGEE sample was nearly 50% cleaner than the non-filtered sample.

pgme use case study for Particle counting from Particle Measuring Systems PMSpgmea chemical batch sampling use case study from Particle Measuring Systems PMSpgee chemical particle counting with batch sampler use case from Particle Measuring Systems PMS

Stay tuned for more process chemical study results in our next blog, due out next week! Can’t wait? Download the full paper here.

Find other case study results here:

  • Cyclohexanone, hydrochloric acid, and ammonia hydroxide
  • Hydrofluoric acid and isopropyl alcohol

Learn more about Particle Measuring Systems 20 nm particle counting solutions for batch sampling solutions:

  • Chem 20 particle counter
  • SLS 20 batch sampler

Relevant Blogs

20 nm Chemical Batch Sampling Solution with the SLS-20 Syringe Sampler

Effective Batch Sampling Down to 20 nm with the SLS-20 Batch Sampler

Chemical Batch Sampling to 20 nm with the SLS-20

Chemical Particle Counting to 20 nm with the SLS-20 Batch Sampler

Particle Counting to 20 nm with the SLS-20 Chemical Batch Sampler

Relevant Webinars

Monitoring Guidelines for the Control of Particle Contamination in High-Purity Process Chemicals

Relevant Papers

20 nm Chemical Batch Sampling Solution with the SLS-20 Syringe Sampler

Advanced Data Analysis Strategies for Understanding Particle Contamination in Chemical Distribution Systems

Monitoring Particles in Process Chemicals

Uncovering chemical quality improvements through a holistic approach to chemical quality management

Component Cleanliness Testing for Liquid Systems

Filed Under: Chem 20, Chemicals, EL, Liquids Tagged With: 20 nm, batch sampling, chem 20, contamination monitoring, high purity chemicals, sls-20

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