20 nm Chemical Batch Sampling Solution
Chemical batch sampling is essential for detecting particles during the chemical distribution for semiconductor manufacturing, where contamination limits continue to tighten. Traditional 30 nm sensitivity is no longer sufficient for advanced processes operating well below this threshold. To meet this challenge, Particle Measuring Systems offers the Chem 20 chemical particle counter, streamlining online 20 nm particle specification control into current practices. The Chem 20 chemical particle counter brings reliable 20 nm measurement online, integrating seamlessly into existing workflows. As the first proven 20 nm particle counter, its advanced signal detection captures events missed by ≥30 nm systems, driving measurable improvements in liquid system quality.
Batch sampling of process chemicals
Particle size specification for process chemicals is a critical quality control for the semiconductor industry. Leading-edge microelectronics manufacturers require very clean process chemicals that are rigorously monitored for contamination and filtered to a particle size of 20 nm or below.
Particle Measuring Systems (PMS) offers the Chem 20™ as the world’s most sensitive particle sensor, propelling online particle specification down to 20 nm for the first time. The SLS-20 syringe sampler, combined with the Chem 20, provides the flexibility of offline batch sampling for a variety of applications, including process chemical research, production, distribution and packaging.
Read this paper to learn more about:
- World-leading 20 nm batch sampling of process chemicals
- How the system makes advances in waste reduction and safety
- Thorough investigations of common use cases performed in collaboration with PMS customers for a variety of chemicals
