AMC Cleanroom Monitor: AirSentry® II Multi-point System
AirSentry II Multi-point AMC Cleanroom Monitor Solutions from Particle Measuring Systems
The AirSentry II Multi-point AMC Cleanroom Monitor is the most advanced airborne molecular contamination (AMC) system available, using sensitive and responsive ion mobility spectrometry to detect and characterize airborne molecular contamination from multiple locations within a cleanroom. This Particle Measuring Systems’ solution features a 16- or 30-point manifold sampling system and an on-board computer with secure software and communications.
In modern cleanroom manufacturing areas, process tools are often spread over large cleanroom areas and multiple floors. Air handlers recirculate the majority of air within a cleanroom which can easily spread airborne molecular contamination to unwanted areas, negatively impacting process steps located away from actual contamination sources. The AirSentry II AMC Monitoring System provides a central and cost-effective monitoring station that allows for rapid contamination detection, as well as monitoring sequences to cover a wide number of sample points spread across a facility. A critical part of a strategic airborne molecular contamination monitoring program.
The AirSentry II line of AMC instruments are included in Particle Measuring Systems’ “Industry Leading Sensitivity” products. This means that there are no products on the market that are more sensitive than these and only PMS offers a line of products covering this many elements of production monitoring. PMS currently leads the market in monitoring performance, sensitivity and reliability in the Ultrapure Water, Chemical and Airborne Molecular Contamination Monitoring fields. PMS’ superior knowledge, technology and service provides High Tech and Chemical manufacturing companies the most advanced tools to make accurate data-driven decisions, improving both performance and yield.
Deb Casher, Cleaning Process Engineer at Excelitas, and Isidro Sanchez, Product Line Manager at Particle Measuring Systems (PMS), talk with Blu Buquoy about AMC Monitoring using the AirSentry II at Excelitas.
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