Particle Measuring Systems (PMS) recently hosted a webinar Contamination Control Strategies for Innovation and Regulatory Compliance to explain how the implementation of a CCS attempts to address the varied causes of contamination and compromised sterility. Download the paper to get answers to all questions asked.
The increasing attention on driving better product yield performance with advanced technology nodes has drawn reasonable discussion for in-tool monitoring to reduce nanoparticles that can have an impact on yield. With that in mind, Particle Measuring Systems (PMS) launched the new NanoAir™ 10 Condensation Particle Counter that measures particles down to 10 nm and the ParticleSeeker™ Smart Manifold system which is the first-ever manifold designed to handle nanoparticle transport. This product will unlock a new world of monitoring possibilities, providing a look into a current blind spot of the requirements and needs in the industry.
There is an optimum air flow rate within unidirectional environments which is required for Isokinetic particle sampling to act as a sheathing air that washes particles from a potential contamination source away from the process risk before being exhausted from the process area. This ensures that this potential contamination does not extend beyond a field of control. This flowrate was historically defined as 90 feet per minute, which roughly converts to 0.45 m/s. Current requirements suggest…
This paper written by Mark Hallworth, one of the ISO TR 14644 21 committee members, discusses why this new technical report was released, the implications, and next steps for practical application. Complete with explanatory diagrams and a decision tree.
