Filter contamination testing
Extended Use Cases of NanoAir™ 10 and ParticleSeeker™ Instruments

The NanoAir™ 10 condensation particle counter delivers reliable nanometer-resolution detection, taking cleanroom and manufacturing monitoring beyond traditional micron-level methods. Its compact, user-friendly design with an enclosed, long-lasting working fluid reservoir enables deployment inside process tools and with the ParticleSeeker™ Smart Manifold for semicontinuous monitoring. This paper explores case studies and expands upon earlier findings on airborne nanoparticle detection with NanoAir™ 10 and ParticleSeeker™ instruments.

Nanoparticle Counter NanoAir 10 for semiconductor tool contamination monitoring
Airborne Nanoparticle Counter to Detect Contamination in Semiconductor Tools

The increasing attention on driving better product yield performance with advanced technology nodes has drawn reasonable discussion for in-tool monitoring to reduce nanoparticles that can have an impact on yield. With that in mind, Particle Measuring Systems (PMS) launched the new NanoAir™ 10 Condensation Particle Counter that measures particles down to 10 nm and the ParticleSeeker™ Smart Manifold system which is the first-ever manifold designed to handle nanoparticle transport. This product will unlock a new world of monitoring possibilities, providing a look into a current blind spot of the requirements and needs in the industry.

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