Industry Leading Sensitivity for Air, Gas, Water, Chemicals and Molecular Contamination

Changing how you monitor
critical fab environments.


Get the industry leading contamination monitoring sensitivity you need from a single source. Only Particle Measuring Systems has contamination monitors down to 20 nm for chemicals, 20 nm for water, 10 nm for air and gas, and 70 ppt for molecular.

This is all supported by our global Application Engineering Team – experts who are deployed around the world to support you in your contamination monitoring application. We understand that your needs are unique to you, as are your processes and your application – our team is here to help you get the best solution.

The NanoAir™ 10, 10 nm air and gas Condensation Particle Counter (CPC) is the latest in our line of Industry Leading Sensitivity products. It provides the sensitivity of a CPC with the ease of use and functionality of a traditional cleanroom particle counter. Designed to monitor ultra-clean environments, it delivers 10 nm detection sensitivity at a sample flow rate of 2.8 L/min (0.1 CFM).

The NanoAir 10’s size is 83% smaller than competitive products making it practical to use anywhere in ultra-clean environments, including inside semiconductor process tools and equipment front-end modules (EFEM). The innovative patent-pending working fluid handling system design is robust and efficient, enabling 24/7/365 days of continuous operation without user intervention of any kind between the annually required working fluid refill and calibration. Thereby, reducing sampling and data collection interruptions and tool downtime.

A 10-port manifold companion product (ParticleSeeker™) supports applications that require multiple sample locations to be monitored in sequential or programmed sequences. Additionally, the NanoAir is high-pressure gas compatible with the HPD-III from PMS, and data can be viewed, analyzed, and reported using PMS Facility Net facility monitoring software or transmitted directly to third-party SCADA systems or process tool inputs.

Learn more by watching this video and click below for a quote.

Contamination Control Products

NanoAir™ 10 Aerosol Particle Counter

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20 nm Liquid Particle Counter: Ultra DI® 20 Plus

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20 nm Chemical Particle Counter: Chem 20™

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AMC Monitoring: AirSentry® II Point-of-Use Ion Mobility Spectrometer

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Or, let us help you find a solution for your contamination monitoring:

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