20 nm online and sample monitoring

20 nm Chemical Particle Counter: Chem 20™

Prevent process failures and poor device performance with the Chem 20™ chemical particle counter.

Ticked bullet point Respond quickly to chemical changes

Ticked bullet point Reduce uncertainty with improved accuracy and reliability

Ticked bullet point Meet the International Roadmap for Devices and Systems (IRDS)

Product Details

Chem 20™ Chemical Particle Counter high-purity process chemicals
Chemical batch Sampler for Chem 20
Contamination monitoring for microelectronics 20 nm sensitivity
chemical batch Sampler
Chemical Particle Monitor
Chemical particle counter for Contamination Control Solution
Chemical Particle Counter back

Increase yield and reduce defects or product recalls by preventing process contamination. The Chem 20™ offers online and batch sample-based chemical monitoring from incoming QC to point of use.

20 nm Sensitivity

Reduce shutdown risks with earlier warnings of smaller changes and contamination. Also, lower downtime and investigations by decreasing false positive. This monitor overcomes background noise, increasing reliability of particle measurements.

Obtain Stable and Repeatable Data

Confidently control your processes while ensuring quality assurance with stable and repeatable data.

Laser Safety and Leak 
Detection

Protects equipment, people and samples with leak detection alarms.

Sensing Bubbles and Handling Flow Reduction

Stop estimating particle concentrations. The Chem 20™ senses bubbles and reductions in sample flow to ensure accurate and reliable monitoring of samples for data integrity.

20nm Online batch and sample monitoring

20 nm Chemical Batch Sampling Solution

Learn why 20nm sensitivity is important in particle counting and how our system makes advances in water reduction and safety in our whitepaper.

Accessories

Liquid particle counter Installation Kit

Liquid Installation Kit

SLS Cleaning Kit

SLS Cleaning Kit

Bubble Separator Device

Bubble Separator Device

Syringe Liquid Particle Sampler: SLS-20

Syringe Liquid Batch Sampler: SLS-20

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