Sensitivity range: 20 - 100 nm

World’s first 20 nm chemical particle counter

Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the new Chem 20 Chemical Particle Counter is the world's most sensitive particle sensor for high purity process chemicals.

Extensive data on chemical distribution and packaging systems proves that the Chem 20 sensor, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.

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Features

  • Advanced laser optics and detectors enable 20 nm sensitivity in chemicals
  • On-board chemical flow meter to set sample flow
  • First particle counter optimized for low and high refractive index chemicals for improved performance:
    • Chem 20 sensor, for chemicals with lower indices of refraction
    • Chem 20-HI sensor, tailored for sulfuric acid and other higher-index chemicals
  • On-board leak detection to provide alarm upon an internal chemical leak
  • Low-flow detector and alarm to ensure consistent data
  • Bubble detector to optimize data and protect sensor
  • Local data display

Benefits

  • Detect 20 nm PSL & 9 nm Au particles in real time
  • Detect yield-limiting particles (not possible with competitive technologies)
  • React quickly to particle excursions long before surface scan or yield data are available
  • Optimize chemical delivery systems from the loading dock to point-of-process
  • Tighten process control limits through improved sample population statistics
  • Optimize instrument operation for very dirty or very clean applications using two view modes, extending product application space
  • Support legacy data acquisition systems with flexible communications

Applications

  • Real-time particle monitoring within chemical distribution systems
  • Point-of-process monitoring
  • Chemical packaging operations monitoring
  • Chemical filter performance and efficiency characterization
  • Performance testing of chemical handling components

Supporting Materials

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