Liquids
Corrosive Liquid Particle Sampler: CLS-700
Typical Applications
- Wet process monitoring
- Chemical process control
- Bath monitoring
- Particle level measurement in effervescent liquids
Product Details
Eliminates bubbles, ensures accurate particle measurement, and streamlines chemical process control with SEMI C1-compliant technology.
- Compression Sampling: Pressurizes the sample to dissolve bubbles, preventing false particle counts in effervescent or gas-containing chemicals.
- Compliance: Fully meets SEMI C1 standards for process chemical particle measurement, ensuring industry-standard accuracy.
- Handles a broad spectrum of corrosive liquids, including sulfuric acid, at temperatures up to 150 °C.
- Supports multiple LiQuilaz® particle counters for size ranges from 0.2 µm to 20 µm, making it adaptable for semiconductor and chemical process monitoring.
- FacilityNet software simplifies online sampling with SPC charts, time plots, and sensor status.
- SamplerSight software supports batch sampling, advanced data storage, retrieval, and report generation.
Resources
- Particle Counting in Process ChemicalsEffervescent and Hot Chemicals
- Precision at the Source: Particle Control for Semiconductor Chemical Suppliers
- Why Particle Monitoring in Process Chemicals Is Non-Negotiable
- Particle Contamination in Chemical Distribution Systems
- 20 nm Chemical Batch Sampling Solution
- Uncovering Chemical Quality Improvements Through a Holistic Approach to Chemical Quality Management
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