Batch sampler for corrosive liquids
Corrosive Liquid Particle Sampler: CLS-700T
Particle Measuring Systems‘ Corrosive Liquid Particle Sampler (CLS) combines a compression sampler with a LiQuilaz® II particle counter for effective measurement of particles in fluids contained in unpressurized vessels.
Product Details
Eliminates bubbles, ensures accurate particle measurement, and streamlines chemical process control for SEMI C1 compliant chemicals.
- Batch sampling: Limits amount of sample collected reducing waste and cost of expensive chemicals.
- Compression Sampling: Pressurizes the sample, taken from a container, to dissolve bubbles, reducing false particle counts in effervescent or gas-containing chemicals.
- Compliance: Fully meets SEMI C1 standards for process chemical particle measurement, ensuring industry-standard accuracy.
- Handles a broad spectrum of corrosive liquids, including sulfuric acid, at temperatures up to 150 °C.
- Supports multiple LiQuilaz® particle counters for size ranges from 0.2 µm to 20 µm, making it adaptable for semiconductor and chemical process monitoring.
- Typical Applications
- Wet process monitoring
- Chemical process control
- Bath monitoring
- Particle level measurement in effervescent liquids
- FacilityNet software simplifies online sampling with SPC charts, time plots, and sensor status.
- SamplerSight software supports batch sampling, advanced data storage, retrieval, and report generation.
Resources
- Particle Counting in Process ChemicalsEffervescent and Hot Chemicals
- Precision at the Source: Particle Control for Semiconductor Chemical Suppliers
- Why Particle Monitoring in Process Chemicals Is Non-Negotiable
- Uncovering Chemical Quality Improvements Through a Holistic Approach to Chemical Quality Management
Contact Us
Still have questions?
Our customer support is ready to answer your questions or get a quote ready for you.
