Chemical Particle Counters

Liquid Particle Counter: LiQuilaz® II S Series

Sensitivity range: 0.2 – 20 µm

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Product Details

  • 0.2 – 20.0 μm particle counter size range
  • Up to 80 ml/min flow rate
  • Compatible with a wide range of process chemicals
  • Small footprint for easy placement anywhere in the process
  • User-selected particle size threshold

S02: 0.2 – 2.0 µm, S03: 0.3 – 3.0 µm, S05: 0.5 – 20.0 µm

  • In-line and batch sampling capabilities
  • Effervescent chemical measurements using compression sampling
  • Chemical quality assurance
  • Process bath monitoring
  • DI water monitoring
  • Chemical delivery systems
  • Photoresist monitoring
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