Get introduced to cleanroom basics, including a review and comparison of ISO and FS209E classifications. Review particle size, composition, types and sources, and discuss commonly used measurements to define the size of irregularly shaped particles and the implication of each technique. Additionally, you will explore particle concentrations in liquid and air samples.
Understand particle behavior by reviewing transport characteristics, interactions and various forces on particles. Get an introduction to filtration mechanisms and filter efficiency curves for air and liquid systems, and learn about the role played by the refractive index, particle size and shape. In addition, the principles of Rayleigh and Mie light scattering will be covered, including basic scattering relationships.
Fundamentals of Optical Particle Counters
This presentation introduces the fundamentals of optical particle counters (OPCs). Topics include OPC design and specifications, industry nomenclature, laser light and detector basics, instrument types and a discussion on sensor resolution and accuracy. The objective of the presentation is to establish a common background and language that will contribute to a better functional understanding of optical particle counters.
Monitoring Particles in Air
Get an introduction to the types of particle counters used to monitor aerosol particles. A comparison between mobile, fixed and sequential monitoring, along with the advantages and disadvantages of each method, will be covered. Additionally, specialized applications and possible types of devices to monitor those applications will be discussed. Equipment includes particle counters, spectrometers, monitors and sensors.
Advanced Liquid Particle Counting
Delve into advanced topics of liquid particle counting, including what happens to particle sizing when the refractive index changes in the fluid, particle or both. Also, learn what constitutes statistical significance, and see what can be done to improve data quality. In the remaining time, we’ll address your specific liquid application questions and search for possible solutions.
Advanced Light Scattering
Take an in-depth look at Mie, Rayleigh and other theories of light scattering, and discuss the origins of the equations and how they were derived. Additionally, take a closer look at the influence particle size, refractive index and shape have on scattering intensity.
Recent Advances in Liquid Particle Counting Technology
Leading-edge microelectronic manufacturing processes require ultrapure water and very clean process chemicals that are filtered and regulated to 20 nm particle size. In this session, you will learn the basics for detecting 20 nm particles in both ultrapure water and a variety of semiconductor process chemicals. Several examples will be discussed where particle sources were detected at the 20 nm particle level. In addition, you will learn how to utilize Poisson’s statistics for assessing the non-random nature of particle sources in both ultrapure water and chemical systems.
Learn methods and techniques for parts cleanliness testing for the semiconductor, hard disk, automotive, and pharmaceutical and medical device industries, including methods of particle extraction, techniques for measuring particles, data analysis and optimizing parameters of ultrasonic extraction.
Learn about nanoparticle sources and impacts, behavior of nanoparticles in clean environments and technologies for measuring nanoparticles, including condensation particle counters, electrometers and scanning mobility particle sizers.
Understanding ISO 21501-4
Released in 2007, the international standard ISO 21501-4 sets guidelines for the calibration and verification of optical particle counters (OPCs) that are used to measure the size and concentration of airborne particles in cleanrooms and associated controlled environments. In the past, many different standards have dealt with OPCs but haven’t been very comprehensive. Engineers from Particle Measuring Systems actively participated in the creation of this ISO standard, and you’ll receive an overview of its adoption, historical procedures and how the standard will affect future developments.
Cleanroom Certification and Products
Did you know that the particle counter you use could impact the certification process? This course discusses the differences between cleanroom certification and monitoring and what is required to perform a cleanroom certification, including an overview of ISO 14644-1 and 14644-2.