ParticleSeeker™ Multiport Aerosol Sampler

Companion manifold to the NanoAir™ and 0.1 CFM Airnet® II aerosol particle counters

The ParticleSeeker is a 10-port aerosol manifold companion to the NanoAir™ 10 and 0.1 CFM Airnet® II aerosol particle counters.

Designed specifically for use in the most critical fab spaces, it is available for use in applications that require multiple sample locations to be monitored in a sequential or programmed sequence. The ParticleSeeker makes it uniquely possible to monitor inside process tool equipment Front End Module (EFEM) minienvironments. Together, the ParticleSeeker and NanoAir provide the ability to monitor up to 120m² of fab/process space when using all 10 manifold ports.

The ParticleSeeker is compatible with the NanoAir™ and all 0.1 CFM Airnet® II particle counters.

ParticleSeeker^TM Multiport Aerosol Sampler Installation, Repair & Maintenance Services. Particle Measuring Systems engineers and manufactures the ParticleSeeker™ Smart Manifold.

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Product Details

10 manifold points
Sample flowrate: 0.1 CFM
Sample interval: Min 1 second, Max 3600 seconds
Up to 120m² of fab/process space sampling coverage
LED’s indicate active sampling port(s)
Multiple (4) sampling modes
» Ensemble: samples all ports simultaneously
» Seeker: targets any port that is identified during ensemble operation
» Synch: communicates with process tool in realtime to follow the wafer within EFEM
» User-Defined
Small footprint: 8.2 x 5.4 x 4.7 in (21x14x12 cm)
Instrument IP address and locations
Dry Contact relay (x4)
4-20mA IN (x4) & OUT (x2) for additional sensors (ex: temp., RH, DAP)
USB for Serial over USB (service port)
USB for thumb drive
Ethernet ports (2): Ethernet Protocol & MODBUS over TCP/IP

Provides 120m² of fab/process space sampling coverage
Only aerosol particle manifold on the market designed and purpose-built for use with sample nanoparticles (<100nm).
Eliminates crosstalk and other common nanoparticle transport handling problems
Capability to monitor multiple sample locations in a sequential or programmed sequence
Multiple Input/output communication interfaces enable seamless SCADA data transfer reducing process tool downtime
DC Power IN and OUT allows the NanoAir 10 to daisy chain with ParticleSeeker to share power and minimize AC outlet usage

ParticleSeeker + NanoAir 10 (aerosol particle counter):

Monitoring inside process tool Equipment Front End Module (EFEM) minienvironments
Ideal for applications requiring programmed sample point monitoring that follows the path of the wafer or other critical surface
Broad contamination monitoring when using multiple manifold ports