Condensation Particle Counter CPC NanoAir™ 10
Get insights from anywhere in your ultra-clean environment with this purpose-built 10 nm condensation particle counter. Increase uptime and improve yield.
Monitor inside semiconductor process tools with the smallest form factor on the market
Uninterrupted, maintenance-free monitoring for 12 months with continuous 24/7 measurements.
Best false count rate of any CPC designed for ultraclean environment monitoring
Product Details
Reduce contamination and improve yield where it matters most with our revolutionary NanoAir™ 10 condensation particle counter (CPC).
This is the only manifold system designed to support nano particle transport and delivery.
A 10-port manifold companion product (ParticleSeeker™) supports applications that require multiple sample locations to be monitored in sequential or programmed sequences.
The 10-port manifold system allows for coverage of an entire EFEM/ Minienvironment with a single CPC. Achieve 120 square feet coverage with manifold system.
Port to port time as little as 0.1 second, with minimized cross talk. The manifold supports various modes of operation for:
- tool qualification
- track / process tracking
- automated response to integrated fab events
- wafer tracking inside process tools
View, analyze and report on data quickly with our FacilityNet Particle Monitoring Software or through direct transmission to third-party SCADA systems or process tools via MODBUS ethernet protocol. Data sampling down to 0.1 seconds enables precise control and actionable process insights.
Data and the instrument can be remotely accessed.
Nanoparticle Counter NanoAir 10 in Semiconductor Manufacturing
Learn how using a Nanoparticle Counter in highly sensitive areas of semiconductor manufacturing helps to effectively identify and control contamination so that yields can be improved.
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