Particle Contamination in High-Purity Process Chemicals
Vaporized Hydrogen Peroxide (VHP) Resistance Testing for MiniCapt Pro Microbial Sampler

Vaporized Hydrogen Peroxide (VHP) serves as a potent oxidizer and has long been acknowledged for its effectiveness in sterilization within enclosed filling isolators. With the rising prevalence of isolator applications, there’s an increasing demand for robust samplers capable of enduring such environments. The MiniCaptĀ® Pro Remote Microbial Sampler features an internal flow path designed to resist the corrosive impacts of VHP.

Nanoparticle Counter NanoAir 10 for semiconductor tool contamination monitoring
Airborne Nanoparticle Counter to Detect Contamination in Semiconductor Tools

The increasing attention on driving better product yield performance with advanced technology nodes has drawn reasonable discussion for in-tool monitoring to reduce nanoparticles that can have an impact on yield. With that in mind, Particle Measuring Systems (PMS) launched the new NanoAirā„¢ 10 Condensation Particle Counter that measures particles down to 10 nm and the ParticleSeekerā„¢ Smart Manifold system which is the first-ever manifold designed to handle nanoparticle transport. This product will unlock a new world of monitoring possibilities, providing a look into a current blind spot of the requirements and needs in the industry.

isokinetic probe particle counter for unidirectional air.
Isokinetic Probe Particle Counter Air Flow Rate Requirements

There is an optimum air flow rate within unidirectional environments which is required for Isokinetic particle sampling to act as a sheathing air that washes particles from a potential contamination source away from the process risk before being exhausted from the process area. This ensures that this potential contamination does not extend beyond a field of control. This flowrate was historically defined as 90 feet per minute, which roughly converts to 0.45 m/s. Current requirements suggest…

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