Precision at the Source: Particle Control for Semiconductor Chemical Suppliers
High-Purity Process Chemical Particle Contamination Control has become increasingly complex due to nanometer technology.Ā As semiconductor devices become increasingly complex, and the critical particle size for todayās leading-edge technology nodes decreases into the sub-10 nm size-range, the control and mitigation of potentially yield-impacting particle contamination at the smallest possible particle size becomes ever more crucial. Until recently, there has been a significant sensitivity gap between the critical particle size and the detection limit of traditional chemical particle counters. This paper covers solutions…
