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Molecular Contamination Monitoring Paper

Airborne Molecular Contamination (AMC) Monitoring

For Advanced DUV and EUV Lithography, Optical Metrology, Precision Optics, and Laser Manufacturing

Molecular contamination monitoring solutions from Particle Measuring Systems

The fabrication of Photolithography masks, reticles, and other precision optical components which are both defect-free and surface-contaminant-free is of critical importance within the Lithography (“Litho”) and metrology functional areas within microelectronics manufacturing. The need for real-time Airborne Molecular Contamination (AMC) monitoring is well established within these industries wherever optical components are manufactured and used for actinic or inspection purposes. This paper will detail the benefits and applications of Ion Mobility Spectrometry (IMS) using Particle Measuring Systems‘ AirSentry® II (ASII) Real-time AMC Analyzer within the Litho, Metrology, and Photo Optical lens manufacturing areas.

COMPLETE THE FORM TO GET THE FULL PAPER

Get the right Airborne Molecular Contamination (AMC) Monitor for your application:

  • AMC Monitor: AirSentry® II Airborne Molecular Contamination

  • AMC Cleanroom Monitor: AirSentry® II Multi-point System

  • AMC Monitoring: AirSentry® II Point-of-Use Ion Mobility Spectrometer

Relevant Airborne Molecular Contamination (AMC)  Monitoring Papers

AirSentry® II Molecular Contamination Analyzers Calibration and Troubleshooting

AMC Airborne Molecular Contamination Control in Clean Manufacturing Environments

Airborne Molecular Contamination Monitoring Optimized for Lithography

Mobile AMC Monitoring System Speeds Detection, Localization and Troubleshooting of Molecular Contamination Sources

 

Get this paper now

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Keep in touch! Receive industry news from us:

Products

  • Aerosol Particle Counters
  • Liquid Particle Counters for Chemical and Water Particle Monitoring Applications
  • Microbial Samplers
  • BioCapt®Certificates of Analysis
  • Compressed Gas Particle Counters
  • Molecular Monitors
  • Software / Data Management

Industries

  • Pharma
  • Semi
  • Photonics & Optics
  • Aerospace
  • Particle Measurement for Industrial Manufacturing

Applications

  • ISO 14644
  • ISO 21501-4
  • USP 797
  • Meet USP 788 Particulate Matter in Injections
  • Parts Cleanliness Testing
  • Annex 1 Latest Draft Revision Updates
  • 21CFR 11

Service & Support

  • Advisory Service
  • Product Calibration and Service
  • Customer Service

Education and Training

  • Knowledge Center
  • Particle College – Electronics Industry Focused
  • Software / Data Management
  • Blog

About Us

  • Contact Particle Measuring Systems
  • Why Choose Particle Measuring Systems
  • Particle Measuring Systems’ Executive Team
  • Careers
  • Corporate Responsibility
  • COBE
  • Parent Company
  • Press Releases
  • ISO Registrations & Quality Policy
  • Trademarks & Patents
  • Anti-Slavery
  • Export Compliance

Particle Measuring Systems- USA

Corporate Headquarters
5475 Airport Blvd.
Boulder, CO 80301

T. +1 303-443-7100
F. +1 303-440-1090
E. [email protected]

Keep in touch! Receive industry news from us:

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