The AirSentry II Multi-point AMC Cleanroom Monitor is the most advanced airborne molecular contamination (AMC) system available, using sensitive and responsive ion mobility spectrometry to detect and characterize airborne molecular contamination from multiple locations within a cleanroom. This Particle Measuring Systems’ solution features a 16- or 30-point manifold sampling system and an on-board computer with secure software and communications.
In modern cleanroom manufacturing areas, process tools are often spread over large cleanroom areas and multiple floors. Air handlers recirculate the majority of air within a cleanroom which can easily spread airborne molecular contamination to unwanted areas, negatively impacting process steps located away from actual contamination sources. The AirSentry II AMC Monitoring System provides a central and cost-effective monitoring station that allows for rapid contamination detection, as well as monitoring sequences to cover a wide number of sample points spread across a facility. A critical part of a strategic airborne molecular contamination monitoring program.