Tag: semiconductor
News
Lithography Defects Caused by AMC (Airborne Molecular Contamination) in the Functional Area
There is a need for more control of deleterious environmental contamination, including better detection and real-time response to undesired AMC concentration levels, the most prevalent of which are the amines class of AMCs.
News
Semiconductor Particle Contamination Control
Wet process equipment contains many components that are potential sources of particle contamination, and the ability to troubleshoot highly contaminating components in real-time without the need for offline laboratory analysis offers a significant benefit to equipment manufacturers.