Particle Cleanliness of Incoming Chemical Deliveries

When receiving deliveries of high-purity process chemicals from the chemical supplier, semiconductor manufacturers will often check particle measurements to verify the chemical is sufficiently clean before accepting it into their facility. If they don’t, their filtration system might not adequately clean it of impurities, even after repeated circulation. […]

Controlling Contamination in Chemical Supply

As the critical particle size for semiconductor devices continues to shrink, the purity of the process chemicals used in their manufacture becomes increasingly important. Chemical suppliers will use a variety of techniques, including filtration, distillation, and ion exchange, to achieve the lowest possible particle contamination levels in their product. […]