The ability to measure the cleanliness of objects of various shapes and materials is important in maintaining a comprehensive contamination control program. This allows a Contamination Control Engineer (CCE) to qualify the effectiveness of different cleaning methods. This can include in-house cleaning lines and comparing parts purchased from various vendors to make direct cleanliness comparisons of different commodity items (gloves, wipes, etc.).
Archives for January 2018
Optimized Molecular Contamination Monitoring for Lithography
A dedicated, point-of-use monitor offers the following advantages over a conventional multipoint sampling system: continuous monitoring, no missed contamination events, sample tubing lengths reduced from 20 – 30 meters to 2 – 3 meters, and 5 – 10x better sensitivity.
