為高壓管路中的製程氣體提供了一個可靠的線上汙染監測 方式。
HPD III High Pressure Diffuser
The HPD III Aerosol Monitoring Accessory is compatible with non-toxic, non-flammable gases such as Clean Dry Air (CDA), Argon, Nitrogen and Carbon dioxide.
Economical monitoring of non-toxic, non-flammable pressurized gases (CDA, N2, Ar, CO2) with atmospheric pressure particle counters.
