High-Purity Process Chemicals
A Comprehensive Solution for the Control of Particle Contamination
With industry-leading 20 nm sensitivity, the Chem 20™ chemical particle counter provides a comprehensive solution for the control and mitigation of particle contamination at 20 nm in High Purity Chemical applications. The use-cases presented here show how the Chem 20 can be utilized throughout the microelectronics industry in a variety of applications at semiconductor manufacturers, chemical suppliers, and at tool and component suppliers.
Read the paper to learn about:
- Particle Measuring Systems‘ leading-edge technology for particle testing for semiconductor devices
- Control and mitigation of potentially yield-impacting particle contamination
- Use-case testing of various processes for chemical suppliers
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