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20 nm Batch Sampling of Process Chemicals

Particle size specification for process chemicals is a critical quality control for the semiconductor industry. Leading-edge microelectronics manufacturers require very clean process chemicals that are rigorously monitored for contamination and filtered to a particle size of 20 nm or below.

Attend this webinar to learn about the world’s only 20 nm chemical contamination monitoring solution, the Chem 20 particle counter from Particle Measuring Systems, and how it combines with the SLS 20 sampler for a complete batch sampling solution. Topics covered include:

  • Product features
    • Overcoming Background Scatter
    • Laser Safety
    • Sensing Bubbles in Sample Flow
    • Handling a Reduction in Sample Flow
    • Leak Detection
    • Obtaining Stable and Repeatable Data
  • Pre-Sampling Processes
    • Container Cleaning
    • Flushing
  • Sample Waste
  • Switching Chemicals
  • Use Cases of Different Chemicals

 

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