LiQuilaz® Liquid Particle Counter S Series

Sensitivity range: S02: 0.2 - 2.0 µm, S03: 0.3 - 3.0 µm, S05: 0.5 - 20.0 µm
Particle Counting Spectrometer for Liquids

LiQuilaz^® Liquid Particle Counter S Series

The LiQuilaz^® optical liquid particle counters are volumetric monitors with a variety of sizing sensitivities as low as 0.2 µm. They provide high precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 306 °F (150 °C).

LiQuilaz II sensors provide the same levels of accuracy, reliability and repeatability that customers have trusted for many years. LiQuilaz II sensors feature both RS-485 and Ethernet network communications. The new Ethernet capability increases product flexibility and makes installation significantly easier.

Volumetric particle counters offer the highest precision possible by measuring 100% sample volumes (up to 80 ml/min) so that short sampling intervals can be utilized without sacrificing statistical significance.

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Features

0.2 – 20.0 μm size range
Up to 80 ml/min flow rate
Compatible with a wide range of process chemicals
Small footprint for easy placement anywhere in the process
User-selected particle size threshold

Benefits

Real-time characterization and analysis of particle contamination allows for immediate response to contamination
Volumetric measurements provide greater accuracy for tighter process control
Optional software makes process control easy with alarm settings, status conditions, sampler setup, and online help
Supports a wide range of applications and fluids
Works with compression or syringe samplers
Compatible with various tubing standards
In-line and batch sampling capabilities
RS-485 and Ethernet networking compatibility
Small footprint for easy placement anywhere in the process
Flexible software provides numerous viewing options for real-time or retrieved data
User-selectable particle size thresholds

Applications

Effervescent chemical measurements using compression sampling
Chemical quality assurance
Process bath monitoring
DI water monitoring
Chemical delivery systems
Photoresist monitoring

Supporting Materials

Application Notes & Brochures

FAQs

Available Accessories

Facility Net
Facility Net provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.
Liquid Installation Kit
For use with online applications, the Liquid Installation Kit includes: a Flaretek^®flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.
Capillary Cleaning Kit
The Capillary Cleaning Kit flushes capillaries with a Flaretek^® adapter and contains: two 10cc syringes and two Flaretek® tube fittings.
Communication Accessories
The LiQuilaz Particle Counter communicates via RS-485 protocol, so communication accessories are required.Depending on the configuration, you may need two cables and a BB485 converter. If the LiQuilaz instruments are daisy-chained (i.e. connected in series), a standard nine-pin serial cable can connect the two instruments.If the computer does not have a nine-pin serial port, a USB-to-serial converter is also required.
Corrosive Liquid Sampler Installation Kit
The Corrosive Liquid Sampler Installation Kit includes: one Flaretek^® flaring tool, three caps, 25ft of 1/4in Perfluoroalkoxy alkanes (PFA) tubing and 10ft of 1/4in poly flow tubing.

LiQuilaz® II Liquid Particle Counter S Series

Models S02, S03, S05