Batch sampling of process chemicals
Particle size specification for process chemicals is a critical quality control for the semiconductor industry. Leading-edge microelectronics manufacturers require very clean process chemicals that are rigorously monitored for contamination and filtered to a particle size of 20 nm or below.
Particle Measuring Systems (PMS) offers the Chem 20™ as the world’s most sensitive particle sensor, propelling online particle specification down to 20 nm for the first time. The SLS-20 syringe sampler, combined with the Chem 20, provides the flexibility of offline batch sampling for a variety of applications, including process chemical research, production, distribution and packaging.
Read this paper to learn more about:
- World-leading 20 nm batch sampling of process chemicals
- How the system makes advances in waste reduction and safety
- Thorough investigations of common use cases performed in collaboration with PMS customers for a variety of chemicals
Complete the form to get this paper.
Relevant Blogs
20 nm Chemical Batch Sampling Solution with the SLS-20 Syringe Sampler
Effective Batch Sampling Down to 20 nm with the SLS-20 Batch Sampler
Chemical Particle Counting to 20 nm with the SLS-20 Batch Sampler
https://www.pmeasuring.com/blog/20-nm-chemical-batch-sampling-particle-measuring-systems/
Relevant Webinars
Monitoring Guidelines for the Control of Particle Contamination in High-Purity Process Chemicals
Relevant Papers
20 nm Chemical Batch Sampling Solution with the SLS-20 Syringe Sampler
Uncovering chemical quality improvements through a holistic approach to chemical quality management
