LiQuilaz® II Maintenance: Capillary Cleaning Procedure
This paper will discuss the size distribution of particles found in ultrapure water systems, explain the statistics of particle counting, and show how sensitivity and sample volume both affect the statistical performance of particle counters.
Semiconductor manufacturing utilizes ultra-pure chemistries which frequently have significant molecular scatter. This high molecular scatter reduces the signal-to-noise efficiency of older particle metrology technology and in some cases prevents its application in more demanding chemistries. In production, an adaptable metrology solution is required to effectively characterize the broad range of chemistries and solutions in use.