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測定粒径：20 - 100 nm
超純水のモニタリング用

Ultra DIシリーズの液中パーティクルカウンターは、最先端のエレクトロニクス産業で使われる超純水中の不溶性微粒子を測定するために開発された、高感度の常時モニタリング装置です。なかでもUltra DI 20は、他社に先駆けて製品化された、粒径 20 nmの微粒子（20 nmのPSL粒子、 9 nmのAu粒子）を検出することができる装置です。進化した光学系構造により、高い精度で安定した測定が可能です。

スペックシートお問い合わせ

Ultrapure Water UPW Contamination Control / 20 nm Particle Counting

Watch this video from a presentation by Glen Slayter, Intel and Dan Rodier, Particle Measuring Systems at the 2020 Ultrapure Micro event. Case study on the benefits of and monitoring of particles in ultrapure water (UPW) down to 20 nm.

　

スペックシート

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FAQs

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アクセサリー

  • Facility Net

    Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

  • Liquid Installation Kit

    For use with online  applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.

  • flow-controllers

    Downstream Flow Controller

    Complete flow control through a liquid particle counter is critical to ensure accurate and actionable data. The Downstream Flow Controllers, FC-200 and FC-100, are the perfect complement to our high precision liquid particle counters.

  • Environmental Control Cabinet for Liquid Particle Sensors

    The Environmental Control Cabinet for Chem 20TM and Ultra DI® 20 precisely controls the environmental temperature to ensure precise and consistent data. Used inside chemical distribution rooms where the ambient temperature is not well-controlled, the Environmental Control Cabinet shields the particle sensor from environmental changes that adversely impact data quality.

  • Bubble Separator Device

    A welded PFA device that allows entrained bubbles in an ultrapure water (UPW) or process chemical sample to separate from the sample stream through buoyancy, prior to the sample entering the liquid particle counter.

関連製品

Ultra DI® 50 液中パーティクルカウンター

最先端の半導体、ウェハーの製造プロセスなどに使用される超純水をモニタリングするための液中パーティクルカウンター。粒径 50 nmの不溶性微粒子を検出。