HSLIS eシリーズ液中パーティクルカウンターは、最先端の半導体プロセスに使用される超純水および高品位薬液を常時モニタリングするための装置です。導入コスト・運用コストが重要視される、複数台を設置する場合や長期の傾向分析を行う場合などに適しています。
HSLIS-M100eは、超純水・高品位薬液の不溶性微粒子を検出します。最小粒径検出感度は100 nmです。オプションのFacility Net モニタリングソフトウェアで統合管理することができます。
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Facility Net
Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.
Liquid Installation Kit
For use with online applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.
Particle Sensor Safety Cabinet
Houses the chemical particle sensor, detects chemical leaks with an external alarm, and provides secondary containment when a leak occurs. In the event of a chemical leak within the chemical particle counter or sample connections, the system will automatically detect the leak, shut off inlet and outlet sample valves, turn off power to the particle sensor, and provide an external alarm contact.
Capillary Cleaning Kit
The Capillary Cleaning Kit flushes capillaries with a Flaretek® adapter and contains: two 10cc syringes and two Flaretek® tube fittings.
Downstream Flow Controller
Complete flow control through a liquid particle counter is critical to ensure accurate and actionable data. The Downstream Flow Controllers, FC-200 and FC-100, are the perfect complement to our high precision liquid particle counters.
