• 10 manifold points
• Sample flowrate: 0.1 CFM
• Sample interval: Min 1 second, Max 3600 seconds
• Up to 120m² of fab/process space sampling coverage
• LED’s indicate active sampling port(s)
• Multiple (4) sampling modes
  » Ensemble: samples all ports simultaneously
  » Seeker: targets any port that is identified during ensemble operation
  » Synch: communicates with process tool in real-time to follow fab process (wafer path) through process tools and mini-environments
  » User-Defined
• Small footprint: 8.2 x 5.4 x 4.7 in (21x14x12 cm)
• Instrument IP address and locations stay with the base station allowing it to swap with minimal downtime (< 5 mins)
• Dry Contact relay (x4)
• 4-20mA analog inputs (x4) and outputs (x2) for additional sensors (ex: temp., RH, DAP)
• USB port
• Ethernet ports (2): Ethernet Protocol & MODBUS over TCP/IP

• Provides 120m² of fab/process space sampling coverage
• Only aerosol particle manifold on the market designed and purpose-built for use with sample nanoparticles (<100nm).
• Eliminates crosstalk and other common nanoparticle transport handling problems
• Capability to monitor multiple sample locations in a sequential or programmed sequence
• Multiple Input/output communication interfaces enable seamless SCADA data transfer reducing process tool downtime
• DC Power ports (x2) allow ParticleSeeker to share power with a NanoAir

ParticleSeeker + NanoAir 10 (aerosol particle counter):

• Monitoring inside process tool Equipment Front End Module (EFEM) minienvironments
• Ideal for applications requiring programmed sample point monitoring that follows the path of the wafer or other critical surface
• Broad contamination monitoring when using multiple manifold ports