S02: 0.2 - 2.0 µm, S03: 0.3 - 3.0 µm, S05: 0.5 - 20.0 µm

LiQuilaz® II optical liquid particle counters are volumetric monitors with a variety of sizing sensitivities as low as 0.2 µm. They provide high precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 306 °F (152 °C).

LiQuilaz II sensors provide the same levels of accuracy, reliability and repeatability that customers have trusted for many years. LiQuilaz II sensors feature both RS-485 and Ethernet network communications. The new Ethernet capability increases product flexibility and makes installation significantly easier.

Volumetric particle counters offer the highest precision possible by measuring 100% sample volumes (up to 80 ml/min) so that short sampling intervals can be utilized without sacrificing statistical significance.

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Features

  • 0.2 - 20.0 μm size range
  • Up to 80 ml/min flow rate
  • Compatible with a wide range of process chemicals
  • Small footprint for easy placement anywhere in the process
  • User-selected particle size threshold

Benefits

  • Real-time characterization and analysis of particle contamination allows for immediate response to contamination
  • Volumetric measurements provide greater accuracy for tighter process control
  • Optional software makes process control easy with alarm settings, status conditions, sampler setup, and online help
  • Supports a wide range of applications and fluids
  • Works with compression or syringe samplers
  • Compatible with various tubing standards
  • In-line and batch sampling capabilities
  • RS-485 and Ethernet networking compatibility
  • Small footprint for easy placement anywhere in the process
  • Flexible software provides numerous viewing options for real-time or retrieved data
  • User-selectable particle size thresholds

Applications

  • Effervescent chemical measurements using compression sampling
  • Chemical quality assurance
  • Process bath monitoring
  • DI water monitoring
  • Chemical delivery systems
  • Photoresist monitoring

Available Accessories

Facility Net Software

Facility Net Software

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

Liquid Installation Kit

Liquid Installation Kit

For use with online  applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.

Particle Sensor Safety Cabinet

Particle Sensor Safety Cabinet

Houses the chemical particle sensor, detects chemical leaks with an external alarm, and provides secondary containment when a leak occurs. In the event of a chemical leak within the chemical particle counter or sample connections, the system will automatically detect the leak, shut off inlet and outlet sample valves, turn off power to the particle sensor, and provide an external alarm contact.

Capillary Cleaning Kit

Capillary Cleaning Kit

The Capillary Cleaning Kit flushes capillaries with a Flaretek® adapter and contains: two 10cc syringes and two Flaretek® tube fittings.

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Still have Questions?

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