Sensitivity range: 0.05 - 0.2 µm

The High Sensitivity Liquid in Situ (HSLIS-M50e) Particle Counter provides continuous, real-time monitoring of contamination levels in de-ionized (DI). The HSLIS Liquid Particle Counter makes it easy to always understand the characteristics of your working fluid. The combination of high sensitivity and low cost makes it ideal when large numbers of sensors and/or long-term trending are required. Integration of the HSLIS Liquid Particle Counter into FacilityNet Software provides an economical way to monitor multiple flow systems and provide dedicated local display and control capabilities.

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  • 4 channel liquid particle counter
  • 0.05, 0.1, 0.15 and 0.2 μm size range
  • Operates with an optimal flow rate of 100 ml/min +/-10%
  • Samples 0.25% of the flow volume or 0.25 ml/min
  • eSeries compatible with FacilityNet Software
  • Existing network can be utilized with ethernet communication to FacilityNet Software


  • Monitor for long-term trends in fluid quality
  • Lower overall costs with the control and monitoring of multiple particle counters with Ethernet networks
  • Low initial capital investment and lower maintenance cost with proven reliability of the HSLIS design
  • Tabular and statistical process control (SPC) charts for detailed statistical information
  • Alphanumeric paging and e-mailing functions to alert operator of data excursions
  • Sensor status displays four-level alarm for monitoring out-of-spec conditions
  • Simplified data interpretation with real-time and retrieved data time plots


  • Quantifying particle concentrations in DI water systems
  • Measuring filter efficiency
  • Detecting bacterial growth in DI water systems
  • Episodic event tracking and alarming
  • Continuous system monitoring

Available Accessories

Facility Net Software

Facility Net Software

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

Liquid Installation Kit

Liquid Installation Kit

For use with online  applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.

Capillary Cleaning Kit

Capillary Cleaning Kit

The Capillary Cleaning Kit flushes capillaries with a Flaretek® adapter and contains: two 10cc syringes and two Flaretek® tube fittings.

Downstream Flow Controller

Downstream Flow Controller

The Downstream Flow Controller for de-ionized water utilizes a rotameter flow indicator.

Related Products

Ultra DI® 20 Liquid Particle Counter

Designed for ultrapure water systems, its low zero count, large sample volume and high counting efficiency provides unsurpassed particle detection at 20 nm sensitivity.

Ultra DI® 50 Liquid Particle Counter

Designed for ultrapure water systems, its low zero count, large sample volume and high counting efficiency provide unsurpassed performance at 50 nm sensitivity.

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