January 29, 2018 03:00:00 PM

Using the Taguchi Method to Determine Optimal Process Settings

Written by Katie Sternberg

The ability to measure the cleanliness of objects of various shapes and materials is important in maintaining a comprehensive contamination control program. This allows a Contamination Control Engineer (CCE) to qualify the effectiveness of different cleaning methods. This can include in-house cleaning lines and comparing parts purchased from various vendors to make direct cleanliness comparisons of different commodity items (gloves, wipes, etc.).

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January 8, 2018 03:00:00 PM

Optimized Molecular Contamination Monitoring for Lithography

Written by Noelle Demo

A dedicated, point-of-use monitor offers the following advantages over a conventional multipoint sampling system: continuous monitoring, no missed contamination events, sample tubing lengths reduced from 20 - 30 meters to 2 - 3 meters, and 5 - 10x better sensitivity.

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