Through continuous process and equipment advancements, semiconductor manufacturers are approaching 14 nm feature sizes and heading even smaller, while hard-disk drive fly heights are now less than 10 nm. This ever-reducing device feature size requires comparable cleanliness-level improvements in ultrapure water (UPW). UPW purity is especially important with its high use in direct contact with wafers as a final cleaning and rinsing agent in many production steps. Leveraging recent advances in laser optics and detector technology, UPW particle concentration ≥20 nm (≥9 nm for metallic particles) can be effectively monitored.
Archives for Februar 2016
February 15, 2016, Boulder, CO – The newly released SurCapt™ Microbial Surface Detection Kit from Particle Measuring Systems (PMS) is an all-inclusive, ready-to-use solution which simplifies and quickens the process of environmental surface testing for biological contamination. The kit uses GreenLight® Technology for the rapid detection of microbial activity on cleanroom surfaces and the design reduces the likelihood of sample cross-contamination and mishandling by the operator.
Are your particle counters ISO 14644-1 compliant and able to be calibrated to all required tests according to ISO 21504-4?
The recent revision of ISO 14644-1 and-2 has introduced several changes for cleanroom classification and monitoring guidelines. This paper highlights the major changes in the new ISO 14644-1 compared to the previous version, as well as the possible impact on the Pharmaceutical EU GMP Annex 1 and FDA Aseptic Processing Guideline.