关键制程分子污染监测

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摘要

Airborne Molecular Contamination,是指气体分子污染物,简称 AMC。在半导体和液晶面板制造中,产品几何尺寸减小得非常快。因此,即使是分子水平上的污染,不通过化学或电气反应,都会造成产品破坏。局部分子污染物凝聚或不同分子污染物之间形成的反应物的沉积会使电路发生短路或断路现象。而且分子污染物还会引起薄膜表面的腐蚀等严重问题,造成生产中大面积的产品报废,严重影响良率。因此需要对关键制程的有害分子污染水平进行监测和持续改善。

有兴趣了解更多?完成此页面的表格可以免费获取 关键制程分子污染监测 应用笔记副本。

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