Sensitivity range: 100 - 500 nm
The UltraChem® 100 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect the smallest particle possible.
If your application requires measuring small particles in chemicals with high molecular scatter, the UltraChem Liquid Particle Counter is the best tool for the job. NanoVision Technology eliminates the competition between the light scattered by fluid molecules and that from the particles.
Background and false counts are a thing of the past. The NanoVision Technology breakthrough ensures only information that matches a particle fingerprint is counted. This results in data you can act on with confidence. The UltraChem Liquid Particle Counter achieves this sensitivity in chemicals using a low-cost laser diode.
The proven long life of the diode enables a three-year warranty for maximum confidence in your particle counter.
Get the performance you demand from a particle counter you can trust.
Features
- Compatible with a wide-range of chemicals
- 100nm sensitivity
- Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
- 3-year warranty
- Solid state laser diode
- Simple design
- Online or batch sampling capabilities
- Multiple communication protocols
Benefits
- Large sample volume for improved data quality
- Adaptive technology makes the instrument immune to most optical contamination See what your particle counter sees
- Measures small particles in a wide range of chemicals, including high molecular scattering fluids
- Small footprint allows placement in various locations
- Quick diagnostics and random distribution alerts you to a real particle event
Applications
- DI water monitoring
- Chemical distribution monitoring
- Chemical quality assurance
- Immersion lithography
Supporting Materials
FAQs
Available Accessories
Facility Net
Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.
Liquid Installation Kit
For use with online applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.
Particle Sensor Safety Cabinet
Houses the chemical particle sensor, detects chemical leaks with an external alarm, and provides secondary containment when a leak occurs. In the event of a chemical leak within the chemical particle counter or sample connections, the system will automatically detect the leak, shut off inlet and outlet sample valves, turn off power to the particle sensor, and provide an external alarm contact.
Particle Sensor Safety Cabinet for Solvent Applications
Provides chemical containment and safe operating conditions for the Chem 20™ and UltraChem® 40 or 100 chemical particle counting sensors.
Related Products
UltraChem® 40 Liquid Particle Counter
The UltraChem® 40 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect 40 nm particles in chemicals with high molecular scatter.
Chem 20™ Chemical Particle Counter
World’s first 20 nm chemical particle counter, detects larger concentrations of particles with better statistics than competitive products.
