Using the Taguchi Method to Determine Optimal Process Settings

The ability to measure the cleanliness of objects of various shapes and materials is important in maintaining a comprehensive contamination control program. This allows a Contamination Control Engineer (CCE) to qualify the effectiveness of different parts or cleaning vendors to make direct cleanliness comparisons of different commodity items (gloves, wipes, ect.), and to evaluate the performance of alternative cleaning recipes on material cleaners.

LSI Logic worked with Particle Measuring Systems (PMS) to develop a machine that provides a repeatable, sensitive testing method. This machine, the Surfex™, uses a DI water recirculating filtration tank, coupled with ultrasonic transducers and a liquid particle counter. The tank is housed in an ISO Class 2 minienvironment.

This article discusses the characterization methodology used to determine the optimal process settings for various materials to be measured, and provides two examples of normal use investigations.