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News Blog
February 10, 2021 03:30 PM

Chemical Particle Counting to 20 nm with the SLS-20 Batch Sampler

Written by PMS

20 nm Chemical Batch Sampling Use Case Studies #2

Chemical batch sampler particle counting systemThe SLS-20 chemical batch sampler and Chem 20 particle counter combined system from Particle Measuring Systems (PMS) has been tested to sample contamination down to 20 nm in chemicals ranging from sulfuric acid to organic solvents. In this blog, we will be taking a look at the following process chemicals:

  • Cyclohexanone
  • Hydrochloric acid
  • Ammonia hydroxide

Cyclohexanone Particle Counting

The particle concentration of some chemicals can be influenced by long-term storage. While some chemicals may need time for their components to fully react, some chemicals may react or change properties under light, air or temperature, creating unwanted particles. The SLS-20 and Chem 20-HI particle counting system was employed to investigate such influence on cyclohexanone. A fresh cyclohexanone sample had significantly lower concentrations of particles in comparison to an open-bottled sample. Good sample-to-sample stability was also obtained from the tests.

cyclohexanone chemical particle counting from Particle Measuring Systems PMS

Hydrochloric Acid Particle Counting

An interesting and challenging way to test the performance of the SLS-20 and Chem 20 particle measuring system is the blind test. Four hydrochloric acid samples of equal composition were put through the system under different processes. The system was able to identify the cleanliness of the samples provided down to 24 nm with High Scatter Mode. Sample A had the highest particle concentration, followed by Sample B and Sample D. Sample C contained the least. PMS was informed the particle trend results were as expected.

Hydrochloric Acid chemical particle counting use case study from Particle Measuring Systems (PMS)

Ammonia Hydroxide Particle Counting

The SLS-20 and Chem 20 has a low refractive index and was the ideal selection for particulate tests of ammonia hydroxide. The system could clearly tell “good” lots and “bad” lots apart down to 20 nm. The contamination monitoring data also indicated the relative particle levels between the two “good” lots.

Ammonia Hydroxide chemical batch sampling use case study from Particle Measuring Systems PMS

 

Stay tuned for more process chemical study results in our next blog, due out next week! Can’t wait? Download the full paper here.

Learn more about our 20 chemical particle counter, Chem 20, and the 20 nm chemical batch sampler SLS 20, or get a quote:

Find other case study results here:

  • Sulfuric acid, PGME, PGMEA and PGEE
  • Hydrofluoric acid and isopropyl alcohol

Relevant Posts

Batch Sampling Down to 20 nm with the SLS-20: What’s New

Effective Batch Sampling Down to 20 nm with the SLS-20 Batch Sampler

Chemical Batch Sampling to 20 nm with the SLS-20

Filed Under: Chem 20, Chemicals, EL, Liquids Tagged With: chem 20, contamination monitoring, high purity process chemicals, microelectronics, sls-20

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