Data from the Chem 20™ Chemical Particle Counter can inform manufacturers on the benefit of strategic filtration systems. In this blog, we look at cleaning systems for ultrapure water and potassium hydroxide.
Using a 20 nm Particle Counter for Filter Cleanliness Testing
Real-time data provided by the Chem 20 allows the user to evaluate the actual performance of their particle filters. For older filters, the Chem 20 can be used to determine whether the filter is still performing satisfactorily, or if it needs replacement.
Customer Satisfaction Comes First to the Particle Measuring Systems Service Team
After you invest in a particle counter, you start a long term, ongoing relationship with the particle counter manufacturer because particle counters are high precision instruments requiring regular calibration and occasional servicing. We know our customers want reliability in a particle counter servicing partner, which means: no hidden costs turnaround time that meets expectations, and […]
Checking Filter Contamination with the Chem 20 Particle Counter
The Chem 20 was placed inline with a dedicated filter-wetting machine used by a semiconductor manufacturer to study the effect of wetting and flushing new particle filters before they are used in production.
Controlling Particle Contamination in Chemical Distribution
Chemical distribution modules control the supply of ultrapure process chemicals to the point of use. The chemical shouldn’t contain yield-threatening particle contamination here due to contact with wafers, masks, and other critical surfaces.
Particle Cleanliness of Incoming Chemical Deliveries
When receiving deliveries of high-purity process chemicals from the chemical supplier, semiconductor manufacturers will often check particle measurements to verify the chemical is sufficiently clean before accepting it into their facility. If they don’t, their filtration system might not adequately clean it of impurities, even after repeated circulation.
Controlling Contamination in Chemical Supply
As the critical particle size for semiconductor devices continues to shrink, the purity of the process chemicals used in their manufacture becomes increasingly important. Chemical suppliers will use a variety of techniques, including filtration, distillation, and ion exchange, to achieve the lowest possible particle contamination levels in their product.
Contamination Control of High-Purity Chemicals
The critical particle size for today’s leading-edge semiconductor technology is shrinking. Now in the sub-10 nm size-range, the control and mitigation of potentially yield-impacting particles is growing more important. Here, we’ll discuss how the Chem 20™ Chemical Particle Counter’s industry-leading sensitivity can be applied to a variety of applications, including…
Particle Counting to 20 nm with the SLS-20 Chemical Batch Sampler
In this blog series, we introduce the most sensitive system for detecting contamination in microelectronic applications. Through several rigorous studies, we demonstrate the veracity and reliability of data collection for various process chemicals.
Chemical Particle Counting to 20 nm with the SLS-20 Batch Sampler
In this blog series, we introduce the most sensitive system for detecting contamination in microelectronic applications. Through several rigorous studies, we demonstrate the veracity and reliability of data collection for various process chemicals.
