Abstract
Decreasing the time to detect, contain and mitigate very low levels of Airborne Contamination (AMC) is becoming more critical for high tech manufacturers. Costs associated with AMC-related quality issues and yield losses are well understood, and adequate reduction of AMC is critical for clean manufacturers to stay competitve. Technical personnel need the flexibility to efficiently collect AMC data with good temporal-spatial resolution anywhere in the clean environment for both sustaining sample plans, as well as to collect site specific data to converge on AMC-alarm sources during troubleshooting events. These are the drivers for the development of a mobile AMC detection system that can be quickly deployed to specific cleanroom locations to establish real-time maps of AMC concentrations.
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