New Particle Monitoring Strategies for DI Water in 300 mm Fabs (249.6 KB)

This paper examines the opportunities in DI water particle monitoring to improve performance, track data trends, and reduce cost by using a combination of high sensitivity particle counters and less expensive, lower sensitivity (0.1 microns) particle counters with very high sample volumes. We detail the impact of size sensitivity, sample volume, and zero count level on DI water particle counter performance. Practical monitoring considerations and particle distribution differences between poorly filtered and highly filtered DI water systems are also covered.

Download above file for full tables and figures, or for overview, see HTML Version.