Continuous Particle Monitoring Of Buffered Oxide Etch Using the CLS-700T (577.2 KB)

The CLS-700T particle counter is capable of qualifying the BOE etch tank more quickly and reliably than the previous method of using witness wafers. Additionally, other maintenance issues can be readily identified and corrected before production wafers are compromised. This saves wafers, and reduces the need for expensive rework.

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